Illumination device, recognizing device with the illumination device, and part mounting device

ABSTRACT

An illumination apparatus includes a through-hole for detection formed at a center portion, and irradiates diffused light and directional light to an object to be detected. The apparatus includes an annular diffusion plate which diffuses light, a light source disposed annularly, and an annular reflection plate which reflects light from the light source to the side of said object to be detected. The diffusion plate, light source, and reflection plate are disposed in the order from the side of said object to be detected. The diffused light is generated by irradiating light from said light source to the object to be detected through said diffusion plate. Light from said light source is reflected by said reflection plate and then irradiated to the object to be detected.

TECHNICAL FIELD

This invention relates to an illumination apparatus which, in case ofrecognizing an object to be detected, such as a mark and an electroniccomponent on a circuit substrate, by use of a sensor such as a camera,illuminates the object to be detected and its vicinity, in order tofacilitate execution of recognition, and a recognition apparatus and acomponent mounting apparatus which were equipped with this.

BACKGROUND TECHNOLOGY

For example, in a component mounting apparatus which mounts electroniccomponents on a circuit substrate, it is generally carried out to imagea mark which was disposed on the circuit substrate and to recognizedthis, for the purpose of position detection etc. of the circuitsubstrate. In case of carrying out recognition of a mark on the suchlikecircuit substrate, an image of the mark and its vicinity is picked up bya camera which was disposed on a mounting head, and that image isprocessed, and thereby, recognition of the mark is carried out. Then, onthe occasion of picking up an image by the camera, an illuminationapparatus for illuminating the mark and its vicinity is used. Examplesof this kind of a recognition apparatus have been known in JP-A-9-116297publication and JP-A-11-249020 publication etc.

FIG. 12 is a sectional side view which shows a first example of arecognition apparatus which is described in JP-A-9-116297 publication.This recognition apparatus is such a thing that illumination is carriedout by an illumination apparatus 70, and an image is picked up by animage pickup camera 75, and the picked-up image which was obtained isprocessed by a control section 86, and thereby, a recognition operationof a mark etc. is carried out. The illumination apparatus 70 has a tubetype case 71 whose lower surface was opened. At a center portion of aceiling wall 72 of the case 71, a through-hole 73 is opened, and on theupper side of that through-hole 73, the image pickup camera 75 isdisposed through a lens 74. An optic axis of the image pickup camera 73runs through a center of the through-hole 73. In addition, at a lowerposition of the through-hole 73 in the case 1, disposed is a half mirror76 which reflects illumination light to be hereinafter described, whichis incident horizontally, toward a vertical-lower side, and transmitslight which passes through the through-hole 73 from the vertical-lowerside and is incident to the image pickup camera 75.

At a middle stand of an inside of the case 71 on the under side of thehalf mirror 76, a fixing plate 78 with a through-hole 77, which iscoaxial with the through-hole 73, is disposed in such a form that itdivides off an inside of the case 71 up and down. On a lower surface ofthat fixing plate 78, a number of first light sources 79 such as LEDsare disposed annularly, so as to surround and enclose the through-hole77 at a center of the fixing plate 78. In addition, on a lower end faceof the case 71, disposed is a diffusion plate which transmitsillumination light from the first light source 79, which was disposed onthe fixing plate 78, to a lower side, over diffusing it. At a center ofthis diffusion plate 80, disposed is a trough-hole 81 which is coaxialwith each through-hole 77, 72, which was disposed on the fixing plate 78and the ceiling wall 72 of the case 71, respectively.

In addition, in a peripheral wall 82 of the case 71, an opening 83 isformed. On an outside of that opening 83, disposed is a second lightsource 85 such as LED which makes illumination light incidenthorizontally toward the half mirror 76 in the case 71, through a lens84. Then, the image pickup camera 75 picks up an image of an object 10to be detected, which is in such a state that it was illuminated by theillumination apparatus 70, through each through-hole 81. 77, 73 of thediffusion plate 80, the fixing plate 78 and the ceiling wall 72 of thecase 71. It is configured that a control section 86 processes this imageobtained, to recognize the object 10 to be detected.

In case that an image of the object 10 to be detected is picked up bythe image pickup camera 75, which was equipped with the suchlikeillumination apparatus 70, to recognize it, the illumination apparatus70 and the image pickup camera 75 are located on the upper side of theobject 1 0 to be detected, and the first light source 79 and the secondlight source 79 are turned on, and thereby, over illuminating the object10 to be detected and its vicinity, its image is picked up. In case thatit was done, light 88, which was irradiated from the first light source79, illuminates the object 10 to be detected and its vicinity, widelyfrom periphery, over being diffused by the diffusion plate 80. Inaddition, light 89, which was irradiated horizontally from the secondlight source 85 through the lens 84, after it was reflected by the halfmirror 76 in the case 71, passes through each through-hole 77, 81 of thefixing plate 78 and the diffusion plate 80, and illuminates the object10 to be detected and its vicinity, from right above, with a directionalcharacteristic. Therefore, the object 10 to be detected and its vicinityare illuminated by the light from right above and the light fromperiphery, and thereby, reflected light from the object 10 to bedetected and its vicinity passes through each through-hole 81, 77, 73,and is incident to the image pickup camera 75. Thereby, an image of theobject 10 to be detected and its vicinity is obtained.

FIG. 13 is a sectional side view which shows a second example of aconventional recognition apparatus which was described in theabove-described JP-A-11-249020 publication. In an illumination apparatus90 of this recognition apparatus, a light path adjustment plate 91 isdisposed in lieu of the diffusion plate of FIG. 12, and the half mirrorand the second light source are not disposed. Other configurations arealmost the same as the thing of FIG. 12, and therefore, identicalreference numerals and signs are given to identical constituentelements, and thereby, its explanation is omitted.

The light path adjustment plate 91 refracts light, which the first lightsource 79 emitted, with different angles, by a small area which wasdivided into a plurality of pieces in a manner of concentric-strips, andcondenses it to a predetermined area where the object 10 to be detectedis located. Then, by irradiating light with a plurality of differentirradiation angles to the object 10 to be detected, it is configured soas to carry out illumination which is suitable for a surface state ofthe object 10 to be detected.

In addition, although it is not shown in the figure, the above-describedJP-A-11-249020 publication discloses an illumination apparatus which wasconfigured in such a manner that a number of light sources are disposedconcentrically, and it is configured so as to be able to adjust anamount of light of the light source with respect to each circumferenceas a unit, depending on a surface state of an object to be detected, andthereby, it was configured to irradiate illumination light which wassuitable for recognition of the object to be detected.

In the meantime, in recent years, such a circuit substrate that goldplating was applied to a substrate mark has increased, and it becomeshard for reflected light from the substrate mark to be incident to animage pickup camera, depending on a style of illuminating, and there wassuch a case that an image with high contrast is not obtained, and arecognition error occurs.

As to this point, in the illumination apparatus 70 shown in FIG. 12,illumination light along an optic axis of the image pickup camera 75 isapplied to the object 10 to be detected, by the half mirror 76, andtherefore, it is possible to sure capture reflected light from theobject 10 to be detected, by the image pickup camera, and it is possibleto obtain an image with high contrast. Therefore, it is possible tosolve the above-described problem that a recognition error occurs.However, the half mirror 76 is disposed, and the second light source 85is allocated on an outside the case 71 through the lens 74, andtherefore, there were such problems that a configuration is complex andit is costly, and in addition, an apparatus grows in size and aninstallation space becomes large.

In addition, in the illumination apparatus 90 shown in FIG. 13, it ispossible to sufficiently secure an amount of light which is applied tothe object 10 to be detected and its vicinity, but it is not possible tosurely solve the problem that it becomes hard for reflected light fromthe substrate mark to be incident to the image pickup camera, since theobject to be detected is irradiated with light from a lateral direction.

In the same manner, the illumination apparatus, which was described inJP-A-11-249020 publication and in which a number of light sources aredisposed concentrically and it was configured so as to be able to adjustan amount of light of that light source with respect to each lightsource group which exists on an identical circumference, can irradiatean object area with illumination light which is optimum on recognizingthe object to be detected, but illuminates the object to be detected,with light from a lateral direction, and therefore, can not surely solvethe problem that it becomes hard for reflected light from the substratemark to be incident to the image pickup camera.

The invention aims to provide, in consideration of the above-describedcircumstance, an illumination apparatus which, even if an object to bedetected is of a mirror surface shape and of a concavity and convexityshape, can carry out appropriate illumination which corresponded to it,over trying to realize low cost and miniaturization with a simpleconfiguration, and accordingly enables to recognize an object to bedetected without an error, and a recognition apparatus and a componentmounting apparatus which were equipped with this.

DISCLOSURE OF THE INVENTION

The above-described aim is accomplished by the following configuration.

-   (1) An illumination apparatus in which a through-hole for detection    is formed at a center portion, and which irradiates diffused light    and directional light to an object to be detected, characterized in    that at least an annular diffusion plate which diffuses light, light    source which were disposed annularly, and an annular reflection    plate which reflects light from the light source to the side of the    above-described object to be detected, are disposed in the order    from the side of the above-described object to be detected, and the    above-described diffused light is generated by irradiating light    from the above-described light source to the object to be detected    through the above-described diffusion plate, and the directional    light is generated by reflecting light from the above-described    light source by the above-described reflection plate and then,    irradiating it to the object to be detected.

In this illumination apparatus, it is possible to irradiate two kinds oflight of the directional light and the diffused light, to the object tobe detected, and therefore, even if the object to be detected is of amirror surface shape and of a concavity and convexity shape, it ispossible to carry out appropriate illumination which corresponded to it,and accordingly, it is possible to carry out stable detection. Inaddition, the directional light, which irradiates the object to bedetected, is generated without using a half mirror, and by use of theannular light sources and the annular reflection plate, and therefore,it is possible to realize miniaturization with a simple configuration.

-   (2) The illumination apparatus characterized in the    above-described (1) that the light source comprises two kinds of a    light source for diffused light and a light source for directional    light, and an annular fixing plate, on which the light source for    diffused light was disposed on a surface which becomes the side of    the above-described object to be detected and the light source for    directional light was disposed on the other surface, was disposed    between the above-described diffusion plate and the above-described    reflection plate.

In this illumination apparatus, two kinds of light sources of the lightsource for diffused light and the light source for directional light aredisposed, and those two kinds of light sources are allocated on frontand back surfaces of the fixing plate, and therefore, it is possible toindependently control irradiated right from respective light sources,and it is possible to adjust a light amount percentage of thedirectional light and the diffused light. Therefore, it is possible tomake up an appropriate illumination state which accords with a surfacestate of an object to be detected.

-   (3) The illumination apparatus characterized in the    above-described (2) that the light source for directional light is    attached through a flexible elastic pin from the above-described    fixing plate.

In this illumination apparatus, the light source for directional lightis attached through the flexible elastic pin, and therefore, it ispossible to adjust a directional characteristic of irradiated light ofthe light source for directional light, by bending the elastic pin.

-   (4) The illumination apparatus characterized in the    above-described (2) or (3) that an illumination control section,    which individually controls the light source for diffused light and    the light source for directional light, is provided, and the    illumination control section carries out a switch operation for    switching over lighting of each light source, and an adjustment    operation for changing illumination intensity of each light source.

In this illumination apparatus, it is possible to individually controllighting and a light amount of the light source for diffused light andthe light source for directional light, by the illumination controlsection, and therefore, it is possible to make up an appropriateillumination state which accords with a surface state of the object tobe detected.

-   (5) The illumination apparatus characterized in any one of the    above-described (1) through (3) that the above-described reflection    plate is a side end face of an inner surface of the case which    provides accommodation for the above-described light source and the    above-described diffusion plate.

In this illumination apparatus, the side end face of the case innersurface is used as the reflection plate, and therefore, there is nonecessity to daringly make the reflection plate separately and to attachit to the case, and it is possible to realize miniaturization of thecase and simplification of the case configuration.

-   (6) The illumination apparatus characterized in the    above-described (5) that at least a side end face of the    above-described case inner surface is of a white color or a metal    color.

In this illumination apparatus, at least the side end face of the caseinner surface is colored by a white color or a metal color, andtherefore, it is possible to make a reflection capability of lightbetter.

-   (7) A recognition apparatus characterized by being equipped with the    illumination apparatus which was described in any one of the    above-described (1) through (6), an image pickup camera which picks    up an image of the object to be detected, which was illuminated by    the illumination apparatus, and a control section which caries out    recognition processing of the object to be detected, by use of the    image which was picked up.

In this recognition apparatus, the object to be detected, which wasilluminated by the illumination apparatus, is picked up by the imagepickup camera, and the control section applies recognition processing tothe picked-up image which was obtained, and thereby, it is possible torecognize the object to be detected, with high accuracy.

-   (8) A component mounting apparatus which has an absorption nozzle,    with which a transfer head, which moves on the upper side of a    substrate, was equipped, absorbed and held a component, and    transfers the above-described transfer head to mount the component    on the substrate at a predetermined position, characterized in that    a recognition apparatus which is disposed on the above-described    transfer head and detects a mark for alignment which was disposed on    the above-described substrate and corrects a mounting position of    the above-described component depending on a detection position of    the mark for alignment is the recognition apparatus which is    described in the above-described (7).

In this component mounting apparatus, even in case that the mark foralignment on the substrate is of a mirror surface such as gold plating,it is possible to detect this mark position with high accuracy, and itis possible to heighten mounting position accuracy of a component.

-   (9) A component mounting apparatus which has an absorption nozzle,    with which a transfer head, which moves on the upper side of a    substrate, was equipped, absorbed and held a component, and    transfers the above-described transfer head to mount the component    on the substrate at a predetermined position, characterized in that    a recognition apparatus which is disposed on the lower side of the    above-described transfer head and recognizes a component which was    absorbed and held by the above-described absorption nozzle is the    recognition apparatus which is described in the above-described (7).

In this component mounting apparatus, even if there are a mirror surfaceand a concavity and convexity surface on a component which is absorbedand held by the absorption nozzle, it is possible to recognize thiscomponent with high accuracy, and it is possible to reduce frequency ofoccurrence of a mounting error.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional side view of an illumination apparatus of theinvention.

FIG. 2 is a sectional view viewed along A-A arrows of FIG. 1.

FIG. 3 is an explanatory view which explains a light path ofillumination light.

FIG. 4 is an explanatory view which shows a pickup image of a substratemark by an image pickup camera.

FIG. 5 is a side sectional view of an illumination apparatus in which alight source for directional light was disposed through an elastic pin.

FIG. 6 is an enlarged perspective view which shows a substantial partconfiguration of the illumination apparatus shown in FIG. 5.

FIG. 7 is a side sectional view of an illumination apparatus in whichillumination light was made to be switchable at the time of diffusedlight illumination,

FIG. 8 is a side sectional view of an illumination apparatus in whichillumination light was made to be switchable at the time of directionallight illumination.

FIG. 9 is an explanatory view of an object to be illuminated, to whichthe illumination apparatus of the invention is applicable.

FIG. 10 is a perspective view which represented a schematicconfiguration of a component mounting apparatus.

FIG. 11 is an operation explanatory view of a transfer head.

FIG. 12 is a side sectional view which shows an example of aconventional illumination apparatus.

FIG. 13 is a side sectional view which shows another example of theconventional illumination apparatus.

Meanwhile, as for reference numerals in the figures, 10 designates anobject to be detected, and 11 designates a case, and 12 designates alight source for directional light, and 13 designates a light source fordiffused light, and 14 designates a diffusion plate, and 15 designates afixing plate, and 17 designates a reflection plate, and 18, 21, 22designate through-holes, and 27 designates an elastic pin, and 30, 31designate illumination control sections, and 10, 10 a, 10 b designateobjects to be detected, and 100, 200, 300 designate illuminationapparatuses, and L1 designates diffused light, and L2 designatesdirectional light.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, preferred implementation modes of an illumination apparatuswhich relates to the invention, and a recognition apparatus and acomponent mounting apparatus which were equipped with this will bedescribed in detail with reference to the drawings.

FIG. 1 is a side sectional view which shows a major configuration of arecognition which relates to the invention, and FIG. 2 is a sectionalview viewed along A-A arrows of FIG. 1.

A recognition apparatus 1 is a thing which picks up an image of anobject 10 to be detected, which was illuminated by an illuminationapparatus 100, by an image pickup camera 20, and processes the picked-upimage which was obtained, by a control section 24, to thereby carry outrecognition of the object 10 to be detected.

This illumination apparatus 100 has a case 11 whose lower surface wasopened to form a tube type and whose inner surface was unified to areflective color such as a white color or a metal color. In an inside ofthe case 11, a number of light sources 12 for directional light andlight sources 13 for diffused light, which comprises LEDs etc., and adiffusion plate 14 are contained. The diffusion plate 14 is allocatedannularly on a lower end face of the case 11, and on its upper side,allocated is an opaque fixing plate 15 in which the light sources 12 fordirectional light were attached to an upper surface, and the lightsources 13 for diffused light were attached to a lower surface Inaddition, on an inner surface (side end face) of a ceiling wall 16 ofthe case 11, formed is a reflection surface as an annular reflectionplate 17 for reflecting light, which is irradiated from the light source12 for directional light, to a lower side. Meanwhile, the annulardiffusion plate 14, reflection plate 17 may be also made as a circularring shape and as a polygon shape.

At a center portion of the ceiling wall 16 which functions as thereflection plate 17, a through-hole 18 as a detection hole is disposed,and on the upper side of that through-hole 18, an image pickup camera(CCD camera etc.) 20 for picking up an image of the object 10 to bedetected, is allocated through a lens 19. An optic axis of this imagepickup camera 20 runs through a center of the through-hole 18. A videosignal of the image pickup camera 20 is inputted to a control section 24which has an image recognition function, and is image-processed here,and thereby, the object 10 to be detected is recognized by the imagewhich was picked up. The lens 19 is a thing which adjusts an expansionrate of the object 10 to be detected- Meanwhile, it is also possible touse another optical sensor, in lieu of the image pickup camera 20.

In addition, reflected light from the object 10 to be detected iscaptured by the image pickup camera 20 through the diffusion plate 14and the fixing plate 15, through-holes 21, 22, which are coaxial withthe through-hole 18 of the case 11, are disposed also at center portionsof the fixing plate 15 and the diffusion plate 14. The, the lightsources 12 for directional light and the light sources 13 for diffusedlight are allocated annularly on upper and lower surfaces of the fixingplate 15 so as to surround the center through-hole 21. As shown in FIG.2, the light sources 12 for directional light are allocated annularly ona circumference with a radius d1, which is coaxial with the through-hole21, and the light sources 13 for diffused light are allocated annularlyon two circumferences with radiuses d2 and d3, which are coaxial withthe through-hole 21. Meanwhile, allocation of each light source is notlimited this, and it is all right if it is allocation by which it ispossible to irradiate light uniformly.

The diffusion plate 14 fulfills a function for transmitting illuminationlight from the first light sources 13 for diffused light, to a lowerside, over diffusing it. In addition, the reflection plate 17 fulfills afunction for reflecting light from the light source 12 for directionallight to a lower side, and generating directional light L1 which passesthrough the though-holes 21, 22 of the fixing plate 15 and the diffusionplate 14 and is irradiated to the object 10 to be detected. Meanwhile,in order to orient light which was reflected by the reflection plate 17,effectively to the object 10 to be detected, passing through thethrough-holes 21, 22, the light sources 12 for directional light areattached to the fixing plate 15 through a tilting table 25.

Next, working of this recognition apparatus 1 will be described.

In case that an image of the object 10 to be detected is picked up bythe image pickup camera 20 by use of the suchlike illumination apparatus100, to carry out recognition processing by the picked-up image whichwas obtained, the illumination apparatus 100 and the image pickup camera20 are allocated on the upper side of the object 10 to be detected, andtwo kinds of light sources of the light source 12 for directional lightand the light source 13 for diffused light are turned on at the sametime, or any one of them is turned on, and thereby, an image of theobject 10 to be detected and its vicinity is picked up over illuminatingit. In that case, in order to heighten a recognition rate andrecognition accuracy, there is a necessity to apply illumination lightwith appropriate light amount and incident angle, to the object 10 to bedetected.

As to this point, according to this illumination apparatus 100, light,which was irradiated from the light source 13 for diffused light,becomes diffused light L1 on the occasion of transmitting the diffusionplate 14, and illuminates widely the object 10 to be detected and itsvicinity from periphery. In addition, light, which was irradiated fromthe light source 12 for directional light, is reflected by thereflection plate 17 to become directional light L2, and it passesthrough each through-hole 21, 22 of the fixing plate 15 and thediffusion plate 14, and illuminates the object 10 to be detected and itsvicinity from nearly right above. Therefore, by the directional light L2from right above and the diffused light L2 from periphery, the object 10to be detected is irradiated with light with different incident angles.As a result of that, reflected light from the object 10 to be detectedand its vicinity passes through each through-hole 21, 22, 18, and isincident to the image pick up camera 20, and thereby, an image withclear contrast is obtained. Therefore, a recognition result by thecontrol section 24 becomes good, and a recognition rate and recognitionaccuracy are improved.

FIG. 3 is an explanatory view for explaining a light path ofillumination light by the illumination apparatus 100.

FIG. 3( a) shows a situation at the time that the light source 12 fordirectional light is turned on and the mirror surface shaped object 10to be detected was illuminated. Light (directional light L2) from thelight source 12 for directional light is reflected once by thereflection plate 17 of a ceiling inner surface of the case 11, andirradiates an object 10 a to be detected. On this account, the longer adistance La between the light source 12 for directional light and thereflection plate 17, and a distance Lb between the reflection plate 17and the object 10 a to be detected, are, the higher a level of adirectional characteristic becomes, and more favorable directionalillumination light is obtained. Reflected light from the mirror surfaceshaped object 10 a to be detected is introduced into the image pickupcamera 20 through the through-holes 22, 21, 18 of the illuminationapparatus 100. Meanwhile, so as for reflected light from the object 10 ato be detected, to enter into the through-holes 22, 21, 18, positions ofthe reflection plate 17 and the light source 12 for directional lightare adjusted arbitrarily.

FIG. 3( b) shows a situation at the time that the light source 12 fordirectional light is turned on, and a concave and convex surface shapedobject 10 b to be detected was illuminated. Light (directional light L2)from the light source 12 for directional light is diffused by a concaveand convex surface of the object 10 b to be detected, and it seldom ornever enter into the through-holes 22, 21 of the illumination apparatus100.

FIG. 3( c) shows a situation at the time that the light source 13 fordiffused light is turned on, and the mirror surface shaped object 10 ato be detected was illuminated. A light path of light from the lightsource 13 for diffused light is diffused by the diffusion plate 14, andit becomes the diffused light L1, and the object 10 a to be detected isirradiated by a random incident angle. On that account, reflected lightfrom the object 10 a to be detected seldom or never enter into thethrough-holes 22, 21 of the illumination apparatus 100.

FIG. 3( d) shows a situation at the time that the light source 13 fordiffused light is turned on, and the concave and convex surface shapedobject 10 b to be detected was illuminated. The diffused light L1, whichis irradiated from the light source 13 for diffused light through thediffusion plate 14, is reflected by the concave and convex surface ofthe object 10 b to be detected, and a part thereof is introduced intothe image pickup camera 20 through the through-holes 22, 21, 18 of theillumination apparatus 100.

Therefore, by having the light source 13 for diffused light and thelight source 12 for directional light turned on, it becomes possible todetect reflected light from the objects 10 a, 10 b to be detected,regardless of surface states of the object 10 a, 10 b to be detected, asshown in FIGS. 3( a),(d), and even if they are of a mirror shape or aconcave and convex surface, it is possible to detect by the image pickupcamera 20.

FIG. 4 is one example of a picked-up image of a substrate mark by theimage pickup camera. For example, in case of picking up an image of asubstrate mark 33 which is of a mirror surface shape as the object 10 tobe detected, reflected light from the object 10 to be detected is surelyintroduced into the image pickup camera 20, and therefore, an image witha definite outline is obtained in a high contrast state. By this, it ispossible to easily obtain a center position (“+” mark position in thefigure) of the substrate mark 33 by image processing, and recognitionprocessing is carried out with necessary and sufficient accuracy.

FIG. 5 is a side sectional view which shows a recognition apparatus of asecond implementation mode of the invention, and FIG. 6 is an enlargedperspective view which shows a substantial part configuration of anillumination apparatus.

As for this illumination apparatus 2, a portion of the illuminationapparatus of the recognition apparatus in the above-described firstimplementation mode is simply different, and other configuration is thesame. On that account, identical reference numerals and signs are givento identical constituent elements, and thereby, its explanation isomitted.

In an illumination apparatus 200, light sources 12 for directionallight, which were allocated on an upper surface side of a fixing plate15, are attached to the fixing plate 15 through flexible elastic pins27. A configuration other than that is the same as in the illuminationapparatus 100 shown in FIG. 1. As above, by attaching the light source12 for directional light through the elastic pin 27, it is possible tovoluntarily adjust a direction of the light source 12 for directionallight, i.e., an irradiation direction. Therefore, it is possible todelicately adjust an irradiation angle of the directional light L2 tothe object 10 to be detected, by bending the elastic pin 27, as shown inFIG. 6.

FIG. 7 is a side sectional view of an illumination apparatus of a thirdimplementation mode of the invention at the time of diffused lightillumination. FIG. 8 is a side sectional view of the same illuminationapparatus at the time of directional light illumination.

A recognition apparatus 3 in this implementation mode is equipped withan illumination control section 30 for individually controlling lightsources 13 for diffused light, and other configuration is the same asthe configuration of the second implementation mode. This illuminationcontrol section 30 carries out a switch operation for switching overlighting of light sources 12 for directional light and light sources 13for diffused light, and an adjustment operation for changingillumination intensity of each light source 12, 13. Therefore, in thisillumination apparatus 300, it is possible to carry out appropriateillumination control depending on a surface state of an object 10 to bedetected.

Meanwhile, the illumination control section 30 may adjust local strengthand weakness of illumination light to an illumination direction, orallocation of strength and weakness between directional light anddiffused light, etc., light amount balance etc., in addition toswitching over the light sources 12, 13 depending on a surface state ofthe object 10 to be detected.

In addition, as a machine which is equipped with the recognitionapparatuses of the invention together with the image pickup camera, acomponent mounting apparatus, a cream solder printing apparatus, anadhesive agent coating apparatus, etc. are cited as examples. As anobject to be detected as an illumination object in that case, there is,for example, an example as in FIG. 9. (a) In the component mountingapparatus, it is a substrate mark 140 on a circuit substrate 141, or acomponent which was absorbed and held by a component absorption nozzle,and (b) in the cream solder printing apparatus, it is a positioning hole150 on a screen 151, and (c) in the adhesive agent coating apparatus, itis an adhesive agent 160 on a while color paper 161.

Here, one example, in which the above-described recognition apparatuswas applied to a component mounting apparatus, will be hereinafterdescribed.

FIG. 10 is a perspective view which represented a schematicconfiguration of a component mounting apparatus, and FIG. 11 is anoperation explanatory view of a transfer head.

As shown in FIG. 10, on a base table of a component mounting apparatus5, a carrier section, which comprises a pair of guide rails 39, isdisposed across a substrate holding section 35, and an unloader section37. By synchronous drive of a carrier belt with which this guide rail 39was equipped, a circuit substrate 41 is carried from a loader section 33at one end side to the substrate holding section 35, the unloadersection 37 at the other end side.

On the base table, Y axis robots 43, 43 are disposed, and between thesetwo Y axis robots 43, 43, an X axis robot 45 is suspended, and by driveof the Y axis robots 43, 43, the X axis robot 45 can go forward andbackward in a Y axis direction In addition, a transfer head 47 isattached to the X axis robot 45, and the transfer head 47 can go forwardand backward in an X axis direction, and by this, the transfer head 47can move in an X-Y plane.

The transfer head 47, which is mounted on an XY robot 49 which comprisesthe X axis robot 45, the Y axis robots 43, 43 and moves universally onthe X-Y plane, is configured so as to be able to absorb a desiredelectronic component, from a component supply section 59 to whichelectronic components such as, for example, resistor chips and chipcapacitors are supplied, through an absorption nozzle 52 which wasattached to a component mounting head 51, and to mount it at a componentmounting position of the circuit substrate 41. The suchlike mountingoperation of an electronic component is controlled on the basis of amounting program which was set up in advance.

On the transfer head 47, an image pickup camera and an illuminationapparatus of a recognition apparatus (any one of the above-describedrecognition apparatuses 1 through 3) are mounted, and the recognitionapparatus 53 detects an amount of reflected light of light which wasirradiated at a position of an object to be detected. This image pickupcamera is connected to a control section, and the control sectioncarries out recognition processing of presence or absence of the objectto be detected and a coordinate, depending on a detection result fromthis image pickup camera. In short, the recognition apparatus 53 ispositioned at an arbitrary position, together with the transfer head 47which is moved by the XY robot 49, and detects a mark of the absorptionnozzle 52 which is the object to be detected, likewise, a productionmanagement mark (position correction mark, NG mark etc.) of the circuitsubstrate 41 which is the object to be detected.

In addition, on the side part of the guide rail 391, disposed is acomponent recognition apparatus 57 (any one of the above-describedrecognition apparatuses 1 thorough 3) for detecting a two-dimensionaldisplacement (absorption posture) of an electronic component which wasabsorbed by the component mounting head 51, and for judging good or bad(e.g., failure such as bending of a lead) of an electronic componentwhich was absorbed by the component mounting head 51. The detecteddisplacement is used for generating data for correcting the transferhead 47 side so as to be canceled at the time of mounting. The componentrecognition apparatus 57 is allocated on a lower side of a head movingpath, and picks up images of plural electronic components which wereabsorbed and held by the component mounting head 51 at one time, duringa period of high speed movement from the component supply section 59 toa mounting position, without stopping the transfer head 47.

Here, a schematic component mounting operation of the component mountingapparatus 5 will be described.

When the circuit substrate 41, which was carried in from the loadersection 33, is carried to a predetermined mounting position, thetransfer head 47 moves in the XY plane by the XY robot 49, and as shownin FIG. 11, absorbs a desired component from the component supplysection 59, and moves on the component recognition apparatus 57, andconfirms an absorption state of an electronic component, and carries outgood or bad judgment and a correction operation. After that, anelectronic component is mounted at a predetermined position of thecircuit substrate 41. On this occasion, the transfer head 47 detectssubstrate marks for alignment which were disposed at diagonal positions,respectively, by an image pickup camera and an illumination apparatus ofthe recognition apparatus 53, and obtains fixed position information ofthe circuit substrate 41, and mounts an electronic component overcarrying out correction of a mounting position.

In this way, the component mounting apparatus 5 completes mounting of anelectronic component to the circuit substrate 41, by repetition ofabsorption of an electronic component, and mounting to the circuit board41. The component mounting apparatus 5 carries out the circuit substrate41 for which mounting was completed, from the mounting position to theunloader section 37, and in addition, carries a new circuit substrate 41in the loader section 33, and repeats the above-described operation.

As described above, according to this component mounting apparatus 5, byapplying a recognition apparatus of the invention to the recognitionapparatus 53 and the component recognition apparatus 57, it becomespossible to select illumination depending on an object to be detected,and even if gold plating is applied to a substrate mark to realize amirror surface, it is possible to detect this substrate mark with highaccuracy, and it is possible to improve mounting position accuracy of acomponent. In addition, recognition accuracy of a component which wasabsorbed and held by the absorption nozzle is improved, and it ispossible to reduce frequency of occurrence of a mounting error.

INDUSTRIAL APPLICABILITY

According to an illumination apparatus of the invention, and arecognition apparatus and a component mounting apparatus which usedthis, it was configured so as to be able to irradiate two kinds of lightof directional light and diffused light to an object to be detected, andtherefore, even if the object to be detected is of a mirror surfaceshape or of a concavity and convexity shape, it is possible to carry outappropriate illumination which corresponded to it, and therefore, it ispossible to detect an object to be detected, stably. Furthermore,directional light is generated by use of annular light sources and anannular reflection plate, without using a half mirror etc., andtherefore, it is possible to realize miniaturization with a simpleconfiguration, and to realize cost down.

1. An illumination apparatus in which a through-hole for detection isformed at a center portion and which irradiates diffused light anddirectional light to an object to be detected, characterized in that atleast an annular diffusion plate which diffuses light, light sourceswhich are allocated annularly, and an annular reflection plate whichreflects light from the light sources to said object to be detected, arerespectively allocated in order from a side of said object to bedetected, and the diffused light is generated by irradiating light fromsaid light sources to the object to be detected through said diffusionplate, and the directional light is generated by reflecting light fromsaid light sources by said reflection plate and then irradiating it tothe object to be detected, and the light sources include a light sourcefor diffused light and a light source for directional light, and anannular fixing plate on which the light source for diffused light isdisposed on a surface facing said object to be detected, and the lightsource for directional light is disposed on another surface of thefixing plate and between said diffusion plate and said reflection plate.2. The illumination apparatus as set forth in claim 1, characterized inthat the light source for directional light is attached through aflexible elastic pin from said fixing plate.
 3. The illuminationapparatus as set forth in claim 1 or 2, characterized in that anillumination control section, which individually controls the lightsource for diffused light and the light source for directional light, isprovided, and the illumination control section carries out a switchoperation for switching over lighting of each light source, and anadjustment operation for changing illumination intensity of each lightsource.
 4. The illumination apparatus as set forth in claim 3,characterized in that said reflection plate is a side end face of aninner surface of a case which provides accommodation for said lightsources and said diffusion plate.
 5. The illumination apparatus as setforth in claim 4, characterized that at least the side end face of saidcase inner surface is of a white color or a metal color.
 6. Arecognition apparatus characterized by being equipped with theillumination apparatus as set forth in claim 1, an image pickup camerawhich picks up an image of the object to be detected, which wasilluminated by the illumination apparatus, and a control section whichcarries out recognition processing of the object to be detected, by useof the image which was picked up.
 7. A component mounting apparatuswhich has an absorption nozzle, with which a transfer head, which moveson an upper side of a substrate, was equipped, absorbed and held acomponent, and transfers said transfer head to mount the component onthe substrate at a predetermined position, characterized in that arecognition apparatus which is disposed on said transfer head anddetects a mark for alignment which was disposed on said substrate andcorrects a mounting position of said component depending on a detectionposition of the mark for alignment is the recognition apparatus which isdescribed in claim
 6. 8. A component mounting apparatus which has anabsorption nozzle, with which a transfer head, which moves on an upperside of a substrate, was equipped, absorbed and held a component, andtransfers said transfer head to mount the component on the substrate ata predetermined position, characterized in that a recognition apparatuswhich is disposed on a lower side of said transfer head and recognizes acomponent which was absorbed and held by said absorption nozzle is therecognition apparatus which is described in claim 6.